Seminar PVD/CVD process

Basic understanding of PVD/CVD processes and the reactions that take place during the process.

CONTENTS

• Fundamentals, basic functioning of PVD/CVD processes
• Physical requirements
• PVD processes: thermal evaporation, sputtering, reactive sputtering, electron beam evaporation, ...
• CVD process: Metal CVD, non-metal CVD, plasma-assisted CVD, ...
• Discussion of specific process problems
   

OBJECTIVE

Basic understanding of PVD/CVD processes and the reactions taking place during the process. Better understanding of own application.

RECOMMENDED DURATION

1 day per process (PVD/CVD)

Workshop target group

Teilnehmer mit Grundkenntnissen der Vakuumtechnik. Monteure, Inbetriebnehmer, Servicemitarbeiter, Schichtführer, Vorarbeiter, Wartungspersonal, ...